Difference between revisions of "Spin Rinse Dryer (SemiTool)"

Revision as of 17:13, 7 September 2017

Spin Rinse Dryer (SemiTool)

Description	?
Manufacturer	SemiTool

Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.

Each has a dedicated cassette that can hold up to 25 wafers.

The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm. A "Dry Only" option is also available.

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-Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.
-Each has a dedicated cassette that can hold up to 25 wafers.
-The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm.  A "Dry Only" option is also available.
 {{tool|{{PAGENAME}}
 |picture=SpinRinse.jpg
@@ Line 13: / Line 7: @@
 |manufacturer =  SemiTool
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+Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.
+Each has a dedicated cassette that can hold up to 25 wafers.
+The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm.  A "Dry Only" option is also available.