Difference between revisions of "Resistivity Mapper (CDE RESMAP)"
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= About = |
= About = |
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− | The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers. |
+ | The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers. |
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+ | The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system. |
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+ | == Instructions == |
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+ | * [[CDE ResMap Quick-Start instructions]] |
Revision as of 12:42, 17 April 2018
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About
The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.
The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.