Difference between revisions of "RIE Etching Recipes"
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=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
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| + | ==InP-InGaAsP-InGaAlAs Etching (RIE 5)== |
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| + | *[[media:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf|InP-InGaAsP-InAlGaAs Etch Recipes - CH<sub>4</sub>-H<sub>2</sub>-Ar]] |
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| + | |||
=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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==AlGaAs Etching (RIE 5)== |
==AlGaAs Etching (RIE 5)== |
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Revision as of 16:39, 23 October 2013
Back to Dry Etching Recipes.