Difference between revisions of "RIE Etching Recipes"
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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==AlGaAs Etching (RIE 5)== |
==AlGaAs Etching (RIE 5)== |
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| − | *[[media:13-GaAs-AlGaAs_Etching-RIE-5.pdf|AlGaAs Etch Recipes]] |
+ | *[[media:13-GaAs-AlGaAs_Etching-RIE-5.pdf|AlGaAs Etch Recipes - BCl<sub>3</sub>-SiCl<sub>4</sub>]] |
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==GaN Etching (RIE 5)== |
==GaN Etching (RIE 5)== |
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*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipes - Cl<sub>2</sub>-BCl<sub>3</sub>-Ar]] |
*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipes - Cl<sub>2</sub>-BCl<sub>3</sub>-Ar]] |
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Revision as of 09:32, 23 October 2013
Back to Dry Etching Recipes.