Difference between revisions of "Other Dry Etching Recipes"
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*[[media:26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf|SiO<sub>2</sub> Etch Recipe 2]] |
*[[media:26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-b.pdf|SiO<sub>2</sub> Etch Recipe 2]] |
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| − | =[[CAIBE (Oxford )]]= |
+ | =[[CAIBE (Oxford Ion Mill)]]= |