High Temp Oven (Blue M)

High Temp Oven (Blue M) Tool Type Lithography Location Bay 5 Supervisor Mike Silva Supervisor Phone (805) 893-3096 Supervisor E-Mail silva@ece.ucsb.edu Description High Temperature Oven Manufacturer Blue M Electric

The Blue M oven has a Nitrogen purge and is programmable for up to 8 custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.