Difference between revisions of "High Temp Oven (Blue M)"

From UCSB Nanofab Wiki
Jump to: navigation, search
(added description of processes etc.)
(tool id included for SUM link)
 
(One intermediate revision by the same user not shown)
Line 6: Line 6:
 
|description = High Temperature Oven
 
|description = High Temperature Oven
 
|manufacturer = Blue M Electric
 
|manufacturer = Blue M Electric
  +
|toolid=56
|materials =
 
  +
}}The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
|toolid=
 
}}The Blue M oven has a Nitrogen purge and is programmable for up to 8 custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
 
   
 
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.
 
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

Latest revision as of 10:55, 4 June 2019

High Temp Oven (Blue M)
BlueMOven.jpg
Tool Type Lithography
Location Bay 5
Supervisor Mike Silva
Supervisor Phone (805) 893-3096
Supervisor E-Mail silva@ece.ucsb.edu
Description High Temperature Oven
Manufacturer Blue M Electric
Sign up for this tool


The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.