Difference between revisions of "High Temp Oven (Blue M)"

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}}The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
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Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

Latest revision as of 09:55, 4 June 2019

High Temp Oven (Blue M)
BlueMOven.jpg
Tool Type Lithography
Location Bay 5
Supervisor Mike Silva
Supervisor Phone (805) 893-3096
Supervisor E-Mail silva@ece.ucsb.edu
Description High Temperature Oven
Manufacturer Blue M Electric
Sign up for this tool


The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.