Difference between revisions of "High Temp Oven (Blue M)"
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| − | }}The Blue M oven has a Nitrogen purge and is |
+ | }}The Blue M oven has a Nitrogen purge and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled. |
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide. |
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide. |
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Revision as of 19:58, 8 September 2017
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The Blue M oven has a Nitrogen purge and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.