Difference between revisions of "Dry Etch"
Jump to navigation
Jump to search
(Created page with "Currently the Nanofab has the following '''{{PAGENAME}}''' tools. Please click on the tool for more information. * RIE 1 * RIE 2 * RIE 3 * RIE 5 * [[Si Deep RIE]…") |
(Redirected page to Tool List#Dry Etch) |
||
| Line 1: | Line 1: | ||
| + | #redirect [[Tool_List#Dry Etch]] |
||
| − | Currently the Nanofab has the following '''{{PAGENAME}}''' tools. Please click on the tool for more information. |
||
| − | |||
| − | * [[RIE 1]] |
||
| − | * [[RIE 2]] |
||
| − | * [[RIE 3]] |
||
| − | * [[RIE 5]] |
||
| − | * [[Si Deep RIE]] |
||
| − | * [[Ashers]] |
||
| − | * [[VLR Etch]] |
||
| − | * [[ICP Etch 1]] |
||
| − | * [[ICP Etch 2]] |
||
| − | * [[UV Ozone Reactor]] |
||
| − | * [[Plasma Clean]] |
||
| − | * [[XeF2 Etch]] |
||
| − | * [[Plasma Activation Tool]] |
||
Latest revision as of 18:00, 27 June 2012
Redirect to: