Difference between revisions of "Automated Coat/Develop System (S-Cubed Flexi)"
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(Added ToolTemplate - tool type and recepe) |
(added PR's and links to recipes) |
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=Detailed Specifications= |
=Detailed Specifications= |
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− | * |
+ | *Wafer Size: 100mm (150mm possible but not set up) |
+ | *PR Coating Properties: |
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⚫ | |||
+ | **Uniformity < 1.0% |
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⚫ | |||
+ | **< 100 particles on 100mm wafer |
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⚫ | |||
+ | **UV6-0.8 |
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+ | **DS-K101-304 |
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+ | **PMMA |
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+ | **PMGI SF11 |
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+ | **PMGI SF5 |
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⚫ | |||
+ | **EBR100 |
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⚫ | |||
+ | **AZ 300 MiF |
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=Process Information= |
=Process Information= |
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+ | *Recipe Page for S-Cubed Coater: [[Lithography Recipes#Automated%20Coat.2FDevelop%20System%20Recipes%20.28S-Cubed%20Flexi.29|Lithography Recipes > Automated Coat/Develop System Recipes (S-Cubed Flexi]]) |
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− | * TBD |
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=Operating Procedures= |
=Operating Procedures= |
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+ | *''To Be Added'' |
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− | * TBD |
Revision as of 16:00, 8 October 2019
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About
To Be Added
Detailed Specifications
- Wafer Size: 100mm (150mm possible but not set up)
- PR Coating Properties:
- Uniformity < 1.0%
- < 100 particles on 100mm wafer
- Photoresists/Underlayers Available:
- UV6-0.8
- DS-K101-304
- PMMA
- PMGI SF11
- PMGI SF5
- Solvents Available:
- EBR100
- Developers Available:
- AZ 300 MiF
Process Information
- Recipe Page for S-Cubed Coater: Lithography Recipes > Automated Coat/Develop System Recipes (S-Cubed Flexi)
Operating Procedures
- To Be Added