Difference between revisions of "Automated Coat/Develop System (S-Cubed Flexi)"

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{{tool|{{PAGENAME}}
 
{{tool|{{PAGENAME}}
 
|picture=TBD.jpg
 
|picture=TBD.jpg
|type = Lithography
 
 
|super= Tony Bosch
 
|super= Tony Bosch
 
|location=Bay 7
 
|location=Bay 7
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|manufacturer = [https://www.s-cubed.com S-Cubed]
 
|manufacturer = [https://www.s-cubed.com S-Cubed]
 
|model = Flexi (Custom)
 
|model = Flexi (Custom)
|ToolType = Wet Processing
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|type = Wet Processing
 
|recipe = Lithography
 
|recipe = Lithography
 
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Revision as of 15:25, 8 October 2019

Automated Coat/Develop System (S-Cubed Flexi)
Tool Type Wet Processing
Location Bay 7
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Automatic Coat/Bake/Develop
Manufacturer S-Cubed
Model Flexi (Custom)
Wet Processing Recipes


THIS TOOL IS ONLY FOR STAFF USE AT THIS TIME.

About

To Be Added

Detailed Specifications

  • Wafer Size: 100mm (150mm possible but not set up)
  • PR Coating Properties:
    • Uniformity < 1.0%
    • < 100 particles on 100mm wafer
  • Photoresists/Underlayers Available:
    • UV6-0.8
    • DS-K101-304
    • PMMA
    • PMGI SF11
    • PMGI SF5
  • Solvents Available:
    • EBR100
  • Developers Available:
    • AZ 300 MiF

Process Information

Operating Procedures

  • To Be Added