Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses

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SUBSTRATE/CHUCK LOADING/CHUCK/SHIM STEPPER WAFER diameter TARGET THICKNESS
Substrate size CHUCK name Substrate thickness=S Pick right chuck Shim chuck size wafer size Chuck thickness=C C+S=12.150( +/- 0.1)mm COMMENT
1/4 of 2" or less SMALL 1/4 of 2" chuck-500um 350um=0.350mm 1/4 of 2"/500um+shim 130um 142 50.8mm 11.646mm 11.646+0.350+0.130=12.126mm OK ≤350um, use shim 130-230um
(Adam:1/4  2") 400um=0.500mm 1/4of2"/500um+shim 130um 142 50.8mm 11.646mm 11.646+0.400+0.130=12.176mm OK (350-500)um, use shim 130-180um
500um=0.500mm 1/4of2"/500um no 142 50.8mm 11.646mm 11.646+0.500=12.146mm OK
604um=0.604mm 1/4of2"/500um no 142 50.8mm 11.646mm 11.646+0.604=12.25mm OK limit
1/4 of 2" or less SMALL 1/4 of 2" chuck-635um 350um=0.350mm 1/4of2"/635um+shim 180um 142 50.8mm 11.536mm 11.536+0.350+0.180=12.126mm OK ≤350um, use shim 180-260um
(Adam:1/4  2") 500um=0.500mm 1/4of2"/635um+shim 130um 142 50.8mm 11.536mm 11.536+0.500+0.130=12.166mm OK
635um=0.635mm 1/4of2"/635um no 142 50.8mm 11.536mm 11.536+0.635=12.171mm OK
714um=0.635mm 1/4of2"/635um no 142 50.8mm 11.536mm 11.536+0.714=12.250mm OK limit
2" and smaller SMALL 2" CHUCK-500um 350um=0.35mm 2"/500um+shim 130um 2  ( for 2") 50.8mm 11.650mm 11.650+0.350+0.130=12.130mm OK ≤350um, use shim 130-230um
(Adam:2") 500um=0.500mm 2"/500um no 2  ( for 2") 50.8mm 11.650mm 11.650+0.500=12.150mm OK
600um=0.600mm 2"/500um no 2  ( for 2") 50.8mm 11.650mm 11.650+0.600=12.250mm OK limit
3" and smaller 3" CHUCK-635um 350um=0.350mm 3"/635um+shim 130um 3( for 3") 76.2mm 11.570mm 11.570+0.350+0.130=12.050mm OK ≤350um, use shim 130-260um
(Adam: 76.2mm) 500um=0.500mm 3"/635um no 3( for 3") 76.2mm 11.570mm 11.570+0.500=12.070mm OK
680um=0.680mm 3"/635um no 3( for 3") 76.2mm 11.570mm 11.570+0.680=12.250mm OK limit
4" and smaller STANDARD CHUCK-500um 350um=0.350mm 4"/500um+shim 130um 100 ( for 4") 100mm 11.630mm 11.630+0.350+0.130=12.11mm OK ≤350um, use shim 130-260um
(Adam: 100mm) 500um=0.500mm 4"/500um no 100 ( for 4") 100mm 11.630mm 11.630+0.500=12.13mm OK
620um=0.620mm 4"/500um no 100 ( for 4") 100mm 11.630mm 11.630+0.620=12.25mm OK limit
4" and smaller BIG METAL CHUCK 350um=0.350mm Al 100mm 130um 100 ( for 4") 100mm 11.570mm 11.570+0.350+0.130=12.050mm OK ≤350um, use shim 130-260um
( Adam:Al 100mm) 500um=0.500mm Al 100mm no 100 ( for 4") 100mm 11.570mm 11.570+0.500=12.070mm OK
635um=0.635mm Al 100mm no 100 ( for 4") 100mm 11.570mm 11.570+0.635=12.205mm OK
680um=0.680mm Al 100mm no 100 ( for 4") 100mm 11.570mm 11.570+0.680=12.250mm OK limit
4" and smaller BLACK MULTI -720um 350um=0.350mm Black multi+shim 260um 7100 76.2mm 11.440mm 11.440+0.350+0.260=12.05mm OK limit
( Adam:Black multi) 500um=0.500mm Black multi+shim 130um 7100 76.2mm 11.440mm 11.440+0.500+0.130=12.07mm OK use shim 130-230um
550um=0.550mm Black multi+shim 260um 7100 76.2mm 11.440mm 11.440+0.550+0.260=12.25mm OK limit
720um=0.720mm Black multi no 7100 76.2mm 11.440mm 11.440+0.720=12.16mm OK
810um=0.810mm Black multi no 7100 76.2mm 11.440mm 11.440+0.810=12.25mm OK limit
6" We do have chuck custom puddles SHIMS: Shims can be cut from other material (cabinet next to stepper, first drawer.  Shim Thickness: 0.01mm to 0.75mm (each color- reperesenrs different thickness)
Thinning down form 12.74 to 11.64! 3C can make them