Stepper 2 (Autostep 200) - Chuck Selection

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AUTOSTEP 200 CHUCKS
Chuck Name / Wafer Size Substrate Thickness Chuck Thickness
1/4 of 2" 500 um 11.646 mm
2" 500 um 11.650 mm
100mm (or 4") 500 um 11.630 mm
1/4 of 2" 635 um 11.536 mm
76.2mm (or 3") 635 um 11.570 mm
Al 100 mm 635 um 11.570 mm
Black Multi 720 um 11.440 mm
TARGET THICKNESS: 12.150mm +/- 0.1mm( 100um)
Target Thickness = Chuck Thickness + Wafer Thickness
Limits on Height/Focus Display ( +/-6V), Ideal ≈ 0V
NOTE: DO NOT OVER TIGHTEN SCREWS!
Please be careful tightening the screws when you use the shims with the stepper chucks. It is easy to over tighten the screws and strip out the chucks. Also, if you notice a screw head is being stripped, please discard the screw and use a new one.