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News from the U.C. Santa Barbara Nanofabrication Facility


New Deep Silicon Etcher

The new Plasma-Therm Versaline DSE III DRIE etcher is qualified and available for use. The new tool features much higher etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. -- Demis (talk) 22:16, 27 November 2017 (PST)

2016 Survey Results

See the May 2016 User Survey Results: Survey Results

CAIBE Ion Mill Available

The CAIBE (Oxford Ion Mill) is up and running! Contact Brian Lingg for more information. (7/2015)

NanoFiles SFTP Online

Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check SignupMonkey for details. (7/7/2013)