Automated Coat/Develop System (S-Cubed Flexi)
THIS TOOL IS ONLY FOR STAFF USE AT THIS TIME.
To Be Added
- Wafer Size: 100mm (150mm possible but not set up)
- PR Coating Properties:
- Uniformity < 1.0%
- < 100 particles on 100mm wafer
- Photoresists/Underlayers Available:
- PMGI SF11
- PMGI SF5
- Solvents Available:
- Developers Available:
- AZ 300 MiF
- Recipe Page for S-Cubed Coater: Lithography Recipes > Automated Coat/Develop System Recipes (S-Cubed Flexi)
- See the Photolith. Chemicals page for info on the installed resists.
- To Be Added