UNAVAILABLE - Optical Profilometer - White-Light/Phase-Shift Interference (Filmetrics Profilm3D)
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THIS TOOL HAS BEEN REMOVED FROM THE LAB AND IS UNAVAILABLE as of 2019. Please see the Olympus LEXT Confocal Microscope for similar capabilities.
About
The Filmetrics Profilm3D is an optical profilometer, using White-Light Interferometry (WLI) and/or Phase-Shift Interference (PSI) imaging through microscope objectives, to produce a 3D image of the sample.
Technique & Capabilities
White-Light Interferometry (WLI) provides an optical measurement similar to a Confocal Microscope, although using white light instead of a single color.
Phase-Shift Interference (PSI) enables sub-nm surface topography for nominally "flat" samples (ie. no step heights), enabling AFM types of measurements with no surface contact and in much less time. Surface curvature of a few-mm area can also be obtained.
Specifications
Performance
| WLI | PSI | |
|---|---|---|
| Thickness Range | 50 nm – 10 mm | 0 – 3 µm |
| RMS Roughness Repeatability | 1.0 nm | 0.1 nm |
| Step Height Accuracy
(8µm step, 1σ) |
0.7% (8 µm step) | |
| Step Height Repeatability
(8µm step, 100 measurements, 1σ) |
0.1% (8 µm step) | |
Objectives
Nikon CF IC Epi Plan - Mirau Inferferometric Objectives
Please use the Working Distances below to adjust your Z-height accordingly when switching objectives.
| Magnification: | 5x | 10x | 50x |
|---|---|---|---|
| Working Distance | 9.3 mm | 7.4 mm | 3.4 mm |
| Field of View
(1x zoom) |
4.0 x 3.4 mm | 2.0 x 1.7 mm | 0.4 x 0.34 mm |
| Resolving Power of Lens | 2.1 µm | 0.92 µm | 0.5 µm |
| Spatial Sampling at 4x Zoom
(pixel size projected on sample) |
1.76 µm | 0.88 µm | 0.176 µm |
| Numeric Aperture | 0.13 | 0.30 | 0.55 |
Mechanical
| Z Range | 100 mm |
| Piezo Range | 500 μm |
| Scan Speed, Vertical | 12 μm |
| XY Stage Type | Automated/Motorized |
| XY Stage Range | 100 mm x 100 mm |
| Tip/Tilt Stage | ± 5°, Manual |
| Camera | 2592 x 1944 (5 megapixels) |
| Camera Zoom* | 1X, 2X, 4X |
Operating Procedures
Quick Start - Surface Roughness Measurement (PSI Mode)
Quick Start - Step Height Measurement (WLI Mode)
Image Stitching for Large-Area Roughness Scans
Offline software
- ProfilmOnline.com (Filmetrics) - online analysis/storage/sharing of 3D topographical data and images. Free account creation, your data remains private unless explicitly shared. This is the recommended method to acquire your files from this tool, as opposed to using the Nanofiles system.