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  • Sputter 5 (AJA ATC 2200-V)
    |super2= Lee Sawyer ...stent, low base pressure. Venting and evacuation are automated with a 1200 l/s turbo pump achieving < 5 E-8T ultimate pressure. A VAT gate valve is used
    3 KB (413 words) - 15:50, 16 September 2022
  • Sputter 3 (AJA ATC 2000-F)
    |super2= Lee Sawyer ...stent, low base pressure. Venting and evacuation are automated with a 1200 l/s turbo (capable of pumping O<sub>2</sub>) achieving an ~ 4.0 E-8 T ultimat
    3 KB (479 words) - 10:36, 30 August 2022
  • Sputter 4 (AJA ATC 2200-V)
    |super2= Lee Sawyer ...stent, low base pressure. Venting and evacuation are automated with a 1200 l/s turbo (capable of pumping O<sub>2</sub>) achieving < 5 E-8T ultimate pres
    3 KB (507 words) - 10:37, 30 August 2022
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