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  • Sputter 3 (AJA ATC 2000-F)
    |super= Tony Bosch |email=bosch@ece.ucsb.edu
    3 KB (479 words) - 10:36, 30 August 2022
  • ICP Etching Recipes
    ==High Rate Bosch Etch (DSEIII)== *[//wiki.nanotech.ucsb.edu/wiki/images/4/4a/10-Si_Etch_Bosch_DSEIII.pdf Bosch Process Recipe and Characterization] - Standard recipe on the tool.
    28 KB (4,350 words) - 17:09, 9 April 2024
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