File:Resolution chart OPC - Screen Shot 2018-07-23 at 1.40.48 PM.png

From UCSB Nanofab Wiki
Jump to navigation Jump to search

Resolution_chart_OPC_-_Screen_Shot_2018-07-23_at_1.40.48_PM.png(673 × 416 pixels, file size: 26 KB, MIME type: image/png)

ASML stepper 3 OPC Resolution Chart Layout, with res. test from 2.0µm to 0.130µm

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current03:17, 1 August 2018Thumbnail for version as of 03:17, 1 August 2018673 × 416 (26 KB)John d (talk | contribs)

The following page uses this file:

Metadata