Difference between revisions of "YES-150C-Various-Resists"
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| − | Pressure drop indicates completion of etch. |
+ | Pressure drop indicates completion of etch. |
| + | Once pressure flattens etching is complete. |
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| + | There is uncertainty in the exact completion time, somewhere between the peak pressure and the point where it goes flat. Using known PR thicknesses (spun at standard spin speeds - see the [https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#PositivePR datasheets]) you can estimate etch rate from these plots. |
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Revision as of 09:46, 25 September 2019
Pressure drop indicates completion of etch.
Once pressure flattens etching is complete.
There is uncertainty in the exact completion time, somewhere between the peak pressure and the point where it goes flat. Using known PR thicknesses (spun at standard spin speeds - see the datasheets) you can estimate etch rate from these plots.
