Difference between revisions of "Wet Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
(Compound Semiconductor Etching)
(Compound Semiconductor Etching)
Line 1: Line 1:
  +
=Compound Semiconductor Etching=
 
  +
How to use the wet etch table:
  +
  +
When entering a new etch into the table make a row for every etchant used in the solution such that the information can be sorted by etchant. For example, the InP etch HCl:H3PO4(1:3) and H3PO4:HCl(3:1). Likewise, if etch is known to be selective to multiple materials the etch should have a row for each material. For example HCl:H3PO4(1:3) is selective to both InGaAs and InGaAsP.
  +
  +
This multiple entry method may seem laborious for the person entering a new etch, however the power of sorting by selective materials and chemicals in a table with all materials is great.
  +
  +
=Example Wet Etching Table (Include All Materials)=
   
 
{| class="wikitable sortable"
 
{| class="wikitable sortable"
 
|-
 
|-
! Material !! Etchant !! Rate (nm/min) !! Anisotropy !! Selective to !! Selectivity !! Ref. !! Notes !! Confirmed by !! Header text
+
! Material !! Etchant !! Rate (nm/min) !! Anisotropy !! Selective to !! Selectivity !! Ref. !! Notes !! Confirmed by !! Extra column
 
|-
 
|-
| InP|| Example || Example || Example || Example || Example || Example || Example || Example || Example
+
| InP|| HCl:H3PO4(1:3)|| ~1000 || Highly || InGaAs || High || [[http://tel.archives-ouvertes.fr/docs/00/76/94/02/PDF/VA2_LAMPONI_MARCO_15032012.pdf | Lamponi (p.102)]] || Example || Jon Doe || Example
 
|-
 
|-
| GaAs|| Example || Example || Example || Example || Example || Example || Example || Example || Example
+
| InP|| HCl:H3PO4(1:3)|| ~1000 || Highly || InGaAsP || High || [[http://tel.archives-ouvertes.fr/docs/00/76/94/02/PDF/VA2_LAMPONI_MARCO_15032012.pdf | Lamponi (p.102)]] || Example || Jon Doe || Example
 
|-
 
|-
| GaN|| Example || Example || Example || Example || Example || Example || Example || Example || Example
+
| InP|| H3PO4:HCl(3:1)|| ~1000 || Highly || InGaAs || High || [[http://tel.archives-ouvertes.fr/docs/00/76/94/02/PDF/VA2_LAMPONI_MARCO_15032012.pdf | Lamponi (p.102)]] || Example || Jon Doe || Example
  +
|-
  +
| InP|| H3PO4:HCl(3:1)|| ~1000 || Highly || InGaAsP || High || [[http://tel.archives-ouvertes.fr/docs/00/76/94/02/PDF/VA2_LAMPONI_MARCO_15032012.pdf | Lamponi (p.102)]] || Example || Jon Doe || Example
 
|}
 
|}
  +
  +
=Compound Semiconductor Etching=
   
 
=Metal Etching=
 
=Metal Etching=

Revision as of 10:25, 6 November 2013

How to use the wet etch table:

When entering a new etch into the table make a row for every etchant used in the solution such that the information can be sorted by etchant. For example, the InP etch HCl:H3PO4(1:3) and H3PO4:HCl(3:1). Likewise, if etch is known to be selective to multiple materials the etch should have a row for each material. For example HCl:H3PO4(1:3) is selective to both InGaAs and InGaAsP.

This multiple entry method may seem laborious for the person entering a new etch, however the power of sorting by selective materials and chemicals in a table with all materials is great.

Example Wet Etching Table (Include All Materials)

Material Etchant Rate (nm/min) Anisotropy Selective to Selectivity Ref. Notes Confirmed by Extra column
InP HCl:H3PO4(1:3) ~1000 Highly InGaAs High [| Lamponi (p.102)] Example Jon Doe Example
InP HCl:H3PO4(1:3) ~1000 Highly InGaAsP High [| Lamponi (p.102)] Example Jon Doe Example
InP H3PO4:HCl(3:1) ~1000 Highly InGaAs High [| Lamponi (p.102)] Example Jon Doe Example
InP H3PO4:HCl(3:1) ~1000 Highly InGaAsP High [| Lamponi (p.102)] Example Jon Doe Example

Compound Semiconductor Etching

Metal Etching

Silicon etching

Dielectric etching

Organic removal

Gold Plating

Chemi-Mechanical Polishing (CMP)