Wafer scanning process traveler

The wafers used for process calibration are ordered from SVM. These are 4 inch silicon wafers with low particle count (LPD= light particle detection<100). The box with 25 wafers is stored in the cleanroom and used only for process calibration. Wafers are handled very carefully, because with every loading and unloading some particles will be added.

Scanning procedure

1. Load desired number of Si wafers to the carrier that says " SURFSCAN" .
2. Place the carrier with wafers to the right indexer.
3. Select in the menu option "CAS" (this will read all wafers that are in the carrier)
4. Load one of standard recipes
5. Select one of the recipes :
   • UCSB Gain4 ( measuring small particles 0.16-2.8um)
   • UCSB Gain2 ( measuring larger particles 2.8-28um)
6. Select the wafer you want to scan
7. Press SCAN
8. Wait until scan is finished
9. Record: LPD, particles #1, particles #8, haze
10. Take a picture of the scan (by phone)