Wafer Scanning/Coating Process Traveler ( combined/less detailed)
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WIP....
The wafers for process calibration are ordered from SVM (https://www.svmi.com/). These are: 4” Si wafers, P/Boron, <100>, 1-30 ohm-cm, 525 +/-25 microns, Polished/Etched, Particles: <=10 @ >=0.3 microns, and have low LPD count (LPD= light particle detection, LPD<100).