Wafer Coating Process Traveler

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There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition, cleaning)

STD SiO2

Standard oxide deposition

STD Nitride2

Standard nitride deposition

STD LS Nitride2 at 300C

Standard low stress nitride deposition

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