Difference between revisions of "Wafer Coating Process Traveler"

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(Replaced content with "There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition,...")
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==== Standard nitride deposition ====
 
==== Standard nitride deposition ====
  
=== STD LS Nitride2 at 300C ===
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=== STD LS Nitride2 ===
  
 
==== Standard low stress nitride deposition ====
 
==== Standard low stress nitride deposition ====

Revision as of 15:43, 22 April 2020

There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition, cleaning)

STD SiO2

Standard oxide deposition

STD Nitride2

Standard nitride deposition

STD LS Nitride2

Standard low stress nitride deposition