Difference between revisions of "Wafer Bonder (SUSS SB6-8E)"
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|type = Thermal Processing |
|type = Thermal Processing |
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+ | |super= Aidan Hopkins |
| + | |super2= Lee Sawyer |
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|phone=(805)839-3918x216 |
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|location=Bay 7 |
|location=Bay 7 |
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Revision as of 10:15, 30 August 2022
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About
This is Karl-Suss model SB-6 substrate bonder. Wafer bonding of pieces to 6” wafers can be done at pressures from 5e-5 to 3e3 mBar and from 50°C to 550°C. This tool mates with the Karl-Suss MA-6 aligner to allow for aligned bonding. Forces up to 20 kN for a 150 mm wafer size are available. The system supports thermal compression as well as anodic bonding (up to 2000 V). The system is computer controlled with a windows environment allowing for multiple recipe steps and saving of recipes and data. The system is configured for manual loading of wafers.
Detailed Specifications
- Wafer bonding from 50°C to 550°C, +/- 5 degrees accuracy, +/- 3% uniformity
- Upper and lower heating of samples
- 5e-5 to 3e3 Torr environment bonding pressure, with Nitrogen
- Sample size: pieces to 6” wafers, aligned bonding by using MA/BA-6 aligner
- Anodic bonding to 2000 V
- Windows-based computer control
- Wafer bonder currently set up for 4" wafers