Difference between revisions of "Wafer Bonder (Logitech WBS7)"

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(added crummy scheamtic picture from manual)
(added link to recipes, short About statement.)
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|manufacturer = Logitech
 
|manufacturer = Logitech
 
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= About =
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== About ==
   
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This tool is used for bonding samples to Silicon carrier wafers with CrystalBond wax. This can be used for through-etching of the sample wafer, for dicing, or sometimes for lithography.
 
==Detailed Specifications==
   
=Detailed Specifications=
 
   
 
==Operation Procedures==
   
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== Recipes ==
=Operation Procedures=
 
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* Recipes > Packaging Recipes > [https://www.nanotech.ucsb.edu/wiki/index.php/Packaging_Recipes#Wafer_Bonder_.28Logitech_WBS7.29 Wafer Bonder (Logitech WBS7)]

Revision as of 09:14, 16 October 2018

Wafer Bonder (Logitech WBS7)
Tool Type Thermal Processing
Location Bay 5
Supervisor Don Freeborn
Supervisor Phone (805) 893-7975
Supervisor E-Mail dfreeborn@ece.ucsb.edu
Description Wafer Bonder WSB7
Manufacturer Logitech


About

This tool is used for bonding samples to Silicon carrier wafers with CrystalBond wax. This can be used for through-etching of the sample wafer, for dicing, or sometimes for lithography.

Detailed Specifications

Operation Procedures

Recipes