Vacuum Oven (YES)

From UCSB Nanofab Wiki
Revision as of 12:12, 3 June 2021 by John d (talk | contribs) (added info from Brian Lingg)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search
The printable version is no longer supported and may have rendering errors. Please update your browser bookmarks and please use the default browser print function instead.
Vacuum Oven (YES)
Vacuum Oven.jpg
Tool Type Lithography
Location Bay 3
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail
Description Vacuum/Ammonia Oven
Manufacturer Yield Engineering Systems

Detailed Info

  • Max. Temp: 250°C
  • Gases available: N2
  • Atmospheric Pressure Only

This oven is slated to be replaced with a programmable, high-temp vacuum oven.