Vacuum Deposition Recipes

Y = Recipe, A = Avaliable

Vacuum Deposition Recipes
	E-Beam Evaporation				Sputtering						Thermal Evaporation		Plasma Enhanced Chemical Vapor Deposition (PECVD)			Atomic Layer Deposition	Molecular Vapor Deposition
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Ion Beam Deposition (Tool)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Molecular Vapor Deposition (Tool)
Ag
Al
Al2O3																R
AlN																R
Au
B
Co
Cr
Cu
Fe
Ge
Hf
HfO2																R
In
Ir
ITO
Mo
Nb
Ni
Pd
Pt
Ru
Si
SiN										R			R	R	R
SiO2										R			R	R	R	R
SiOxNy
Sn
SrF2
Ta
Ta2O5										R
Ti
TiN
TiO2
V
W
Zn
ZnO2
Zr
ZrO2																R
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Ion Beam Deposition (Tool)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Molecular Vapor Deposition (Tool)