Vacuum Deposition Recipes

Process Control Data

See linked page for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films.

Deposition Tools/Materials Table

• R: Recipe is available. Clicking this link will take you to the recipe.
• A: Material is available for use, but no recipes are provided.

Vacuum Deposition Recipes
	E-Beam Evaporation				Sputtering				Thermal Evaporation		Plasma Enhanced Chemical Vapor Deposition (PECVD)			Atomic Layer Deposition	Molecular Vapor Deposition
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 3 (AJA ATC 2000-F)	Sputter 4 (AJA ATC 2200-V)	Sputter 5 (AJA ATC 2200-V)	Ion Beam Deposition (Veeco Nexus)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Oxford FlexAL)	Molecular Vapor Deposition (Tool)
Ag	A		A	A	A	A
Al	A		A	A	A	R		A	A	A
Al2O3	A	A			A	R		R						R
AlN					A	A		A						R
Au	A		A	A	A	R			A	A
B
C	R
CeO2		R
Co	A			A	R
Cr	A			A	R				A	A
Cu	A				R	A
Fe	A			A	R
Ge	A		A	A	A	A
GeO2		A
Gd	A			A
Hf	A
HfO2					A	A								R
In										A
Ir	A
ITO		R			A	A		A
MgF2					A	A
MgO		A
Mo	A				R	A
Nb	A					R
Nd						A
Ni	A		A	A	R				A	A
NiCr	A			A
NiFe	A			A	A
Pd	A		A	A					A	A
Pt	A		A	A	A	R	R							R
Ru	A			A		R								R
Si		A			R	A		A				R
SiN					R	A		R			R	R	R
SiN - Low Stress											R	R	R
SiO2	A	A			R	A	A	R			R	R	R	R
SiOxNy								R			R
Sn										A
SrF2		A
Ta	A				R	A		A
Ta2O5				A				R
Ti	A		A	A	R	R	R	A
TiN						R		A						R
TiW	A				A	R
TiO2		A			A	R		R						R
V					A	A
W	A				A	R
Zn									A	A
ZnO														R
Zr	A			A	A	A
ZrO2														R
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (ATC 2200-V)	Ion Beam Deposition (Veeco Nexus)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Oxford FlexAl)	Molecular Vapor Deposition (Tool)