Difference between revisions of "Vacuum Deposition Recipes"
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| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}} |
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}} |
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| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|SiO2 deposition (ALD)}} |
| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|SiO2 deposition (ALD)}} |
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+ | | bgcolor="EEFFFF" | {{rl|Ion Beam Deposition Recipes|SiO2 deposition (IBD)}} |
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+ | | {{rl|Ion Beam Deposition Recipes|Ta2O5 deposition (IBD)}} |
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