Difference between revisions of "Vacuum Deposition Recipes"
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| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}} |
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}} |
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| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}} |
| bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}} |
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+ | | bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (Unaxis VLR)}} |
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| bgcolor="EEFFFF" | |
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| bgcolor="EEFFFF" | |
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