Difference between revisions of "Vacuum Deposition Recipes"
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+ | | {{rl|PECVD Recipes|SiN deposition (PECVD #1)}} |
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+ | | {{rl|PECVD Recipes|SiN deposition (PECVD #2)}} |
+ | | {{rl|PECVD Recipes|SiN deposition (Unaxis VLR)}} |
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− | | [[PECVD_Recipes#SiN_deposition_.28Unaxis_VLR.29|Y]] |
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+ | | bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #1)}} |
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+ | | bgcolor="EEFFFF" | {{rl|PECVD Recipes|SiO2 deposition (PECVD #2)}} |
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