Difference between revisions of "Vacuum Deposition Recipes"
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(link to process control data) |
(→Deposition Tools/Materials Table: removed tempalte for smaller table explanation) |
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+ | ===[[Process Group - Process Control Data#Deposition .28Process Control Data.29|<u>Process Control Data</u>]]=== |
See [[Process Group - Process Control Data#Deposition .28Process Control Data.29|linked page]] for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films. |
See [[Process Group - Process Control Data#Deposition .28Process Control Data.29|linked page]] for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films. |
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− | === |
+ | ===Deposition Tools/Materials Table=== |
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− | {{Recipe Table Explanation}} |
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+ | * <small>'''R''': ''Recipe is available. Clicking this link will take you to the recipe.''</small> |
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+ | * <small>'''A''': ''Material is available for use, but no recipes are provided.''</small> |
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Revision as of 15:44, 7 July 2022
Process Control Data
See linked page for process control data (calibration data over time, such as dep. rate, refractive index, stress etc.) over time, for a selection of highly used tools/films.
Deposition Tools/Materials Table
- R: Recipe is available. Clicking this link will take you to the recipe.
- A: Material is available for use, but no recipes are provided.