Difference between revisions of "Vacuum Deposition Recipes"
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(Corrected Unaxis Dep links. New row: low-stress Nitride.) |
(added link to APutter 4 : Ru ("A")) |
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|{{Al/E4}} | |{{Al/E4}} | ||
|<br> | |<br> | ||
− | | | + | |[[Sputtering Recipes#Ru Deposition .28Sputter 4.29|A]] |
|<br> | |<br> | ||
|<br> | |<br> |
Revision as of 10:48, 12 January 2021
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.