Difference between revisions of "Vacuum Deposition Recipes"
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− | + | |{{rl|PECVD Recipes|Low-Stress SiN - LS-SiN (PECVD#1)}} |
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− | + | |{{rl|PECVD Recipes|Low-Stress SiN deposition (PECVD #2)}} |
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− | + | |{{rl|PECVD Recipes|SiN LS 250C Deposition (Unaxis VLR)}} |
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! bgcolor="#d0e7ff" align="center" |SiO<sub>2</sub> |
! bgcolor="#d0e7ff" align="center" |SiO<sub>2</sub> |
Revision as of 13:24, 2 June 2021
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.