UV Ozone Reactor

From UCSB Nanofab Wiki
Revision as of 09:46, 11 April 2019 by Sawyer l (talk | contribs) (→‎About)
Jump to navigation Jump to search
UV Ozone Reactor
Tool Type Dry Etch
Location Bay 5
Supervisor Lee Sawyer
Supervisor Phone (805) 893-2123
Supervisor E-Mail lee_sawyer@ucsb.edu
Description UV Ozone Reactor
Manufacturer Jelight
Model M-144AX
Dry Etch Recipes


The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Operating Procedures