UV Ozone Reactor

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UV Ozone Reactor
Ozone.jpg
Location Bay 5
Tool Type Dry Etch
Manufacturer Jelight
Model M-144AX
Description UV Ozone Reactor
Primary Supervisor Lee Sawyer
(805) 893-2123
lee_sawyer@ucsb.edu

Secondary Supervisor

Tony Bosch

Recipes Dry Etch RecipesN/A


About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Documentation

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=UV_Ozone_Reactor&oldid=160341"