Tube Furnace (Tystar 8300)

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Tube Furnace (Tystar 8300)
Tool Type Thermal Processing
Location Bay 4
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail
Description Tystar 8" 3-Tube Oxidation/Annealing System
Manufacturer Tystar Corporation
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The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for one tube each:

  1. SOG curing - Tube 1
  2. Dry or wet oxidation of silicon - Tubes 2 and 3
  3. General furnace annealing - Tube 3

Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1050°C for the system. Gases used are O2, Steam from DI-H2O, N2.

Process Information


Useful Information

Tystar Wafer Boat Drawing - 4" Wafer with 0.5mm Slots

See Also