Tube Furnace (Tystar 8300)
The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for one tube each:
- Dry or wet oxidation of silicon - Tubes 2 and 3
- SOG curing - Tube 1
- General furnace annealing - Tube 3
The tubes can hold up to one hundred 8” wafers per tube per cycle. We have boats for various wafer sizes, including pieces. The maximum temperature is 1050°C for the system. Gases used are O2, Steam from DI-H2O, N2.