Tube Furnace (Tystar 8300)

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Tube Furnace (Tystar 8300)
Tystar.jpg
Tool Type Thermal Processing
Location Bay 3
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Tystar 8" 3-Tube Oxidation/Annealing System
Manufacturer Tystar Corporation


About

The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for one tube each:

  1. Dry or wet oxidation of silicon - Tubes 2 and 3
  2. SOG curing - Tube 1
  3. General furnace annealing - Tube 3

The tubes can hold up to one hundred 8” wafers per tube per cycle. We have boats for various wafer sizes, including pieces. The maximum temperature is 1050°C for the system. Gases used are O2, Steam from DI-H2O, N2.

Under the “ambient” variable use the following:

  • Wet – 0.945
  • Dry – 1.298

These numbers will give accurate growth calculations.

See Also