Tube Furnace (Tystar 8300)

Tube Furnace (Tystar 8300) Tool Type Thermal Processing Location Bay 3 Supervisor Tony Bosch Supervisor Phone (805) 893-3486 Supervisor E-Mail bosch@ece.ucsb.edu Description Tystar 8" 3-Tube Oxidation/Annealing System Manufacturer Tystar Corporation

About

The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for one tube each:

1. Dry or wet oxidation of silicon - Tubes 2 and 3
2. SOG curing - Tube 1
3. General furnace annealing - Tube 3

The tubes can hold up to one hundred 8” wafers per tube per cycle. We have boats for various wafer sizes, including pieces. The maximum temperature is 1050°C for the system. Gases used are O₂, Steam from DI-H₂O, N₂.

Under the “ambient” variable use the following:

• Wet – 0.945
• Dry – 1.298

These numbers will give accurate growth calculations.

See Also

• Tystar - Manufacturer of the tool
• Silicon Thermal Oxide Thickness Calculator - Use this on-line calculator to calculate times for silicon oxidation.