Difference between revisions of "Tube Furnace (Tystar 8300)"

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# General furnace annealing - Tube 3
 
# General furnace annealing - Tube 3
  
The tubes can hold up to one hundred 8” wafers per tube per cycle. We have boats for various wafer sizes, including pieces. The maximum temperature is 1050°C for the system. Gases used are O<sub>2</sub>, Steam from DI-H<sub>2</sub>O, N<sub>2</sub>.
+
Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1050°C for the system. Gases used are O<sub>2</sub>, Steam from DI-H<sub>2</sub>O, N<sub>2</sub>.
  
 
=Process Information=
 
=Process Information=

Revision as of 13:35, 18 March 2014

Tube Furnace (Tystar 8300)
Tystar.jpg
Tool Type Thermal Processing
Location Bay 4
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Tystar 8" 3-Tube Oxidation/Annealing System
Manufacturer Tystar Corporation
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About

The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for one tube each:

  1. SOG curing - Tube 1
  2. Dry or wet oxidation of silicon - Tubes 2 and 3
  3. General furnace annealing - Tube 3

Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1050°C for the system. Gases used are O2, Steam from DI-H2O, N2.

Process Information

Recipes

Useful Information

Tystar Wafer Boat Drawing - 4" Wafer with 0.5mm Slots

See Also