Difference between revisions of "Tube Furnace (Tystar 8300)"

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*[http://www.tystar.com/ Tystar] - Manufacturer of the tool
 
*[http://www.tystar.com/ Tystar] - Manufacturer of the tool
 
*[http://www.cleanroom.byu.edu/OxideTimeCalc.phtml Silicon Thermal Oxide Thickness Calculator] - Use this on-line calculator to calculate times for silicon oxidation.
 
*[http://www.cleanroom.byu.edu/OxideTimeCalc.phtml Silicon Thermal Oxide Thickness Calculator] - Use this on-line calculator to calculate times for silicon oxidation.
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=Operational Instructions=

Revision as of 12:48, 18 March 2014

Tube Furnace (Tystar 8300)
Tystar.jpg
Tool Type Thermal Processing
Location Bay 4
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Tystar 8" 3-Tube Oxidation/Annealing System
Manufacturer Tystar Corporation
Sign up for this tool


About

The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for one tube each:

  1. SOG curing - Tube 1
  2. Dry or wet oxidation of silicon - Tubes 2 and 3
  3. General furnace annealing - Tube 3

Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1050°C for the system. Gases used are O2, Steam from DI-H2O, N2.

Process Information

Use the BYU Thermal Oxidation Calculator to determine the time and temperature that will be necessary for your process needs. Keep in mind that all process must be 30 minutes in length at a minimum. Processes less than 30 minutes will suffer from poor uniformity because the process tube will not have sufficient time to saturate with O2 or DI-H2O.

Recipes

Tube 1 - SOG425.001

Tube 2 - WET1050.002, DRY1050.002, WETVAR.002, DRYVAR.002

Tube 3 - WET1050.003, DRY1050.003, WETVAR.003, DRYVAR.003, ANNEAL.003

Useful Information

Tystar Wafer Boat Drawing - 4" Wafer with 0.5mm Slots

See Also

Operational Instructions