Tool List

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Revision as of 11:05, 19 December 2019 by John d (talk | contribs) (→‎Lithography: added POLOS spinners)
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Photoresists and Lithography Chemicals
Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography
Lithography Support
  • The Spinner Benches have pre-set hotplates at various temperatures appropriate for common photoresist bakes.
  • POLOS spinners on Develop and Solvent benches
  • Spin/Rinse/Dryer

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing


Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools