Tool List

From UCSB Nanofab Wiki
Revision as of 11:05, 19 December 2019 by John d (talk | contribs) (Lithography: added POLOS spinners)
Jump to: navigation, search

Lithography

Photoresists and Lithography Chemicals
Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography
Lithography Support
  • The Spinner Benches have pre-set hotplates at various temperatures appropriate for common photoresist bakes.
  • POLOS spinners on Develop and Solvent benches
  • Spin/Rinse/Dryer

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
ICP-RIE
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools