Difference between revisions of "Tool List"

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*[[RIE 5 (PlasmaTherm SLR)]]  
 
*[[RIE 5 (PlasmaTherm SLR)]]  
 
*[[Si Deep RIE (Bosch Etch)]]  
 
*[[Si Deep RIE (Bosch Etch)]]  
*[[Ashers (Technics PEII]]  
+
*[[Ashers (Technics PEII}]]  
 
*[[Unaxis VLR ICP-Etch]]
 
*[[Unaxis VLR ICP-Etch]]
  

Revision as of 20:45, 30 June 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization