Difference between revisions of "Tool List"
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* [[Si Deep RIE]] | * [[Si Deep RIE]] | ||
* [[Ashers]] | * [[Ashers]] | ||
| − | * [[VLR Etch]] | + | * [[Unaxis VLR ICP-Etch]] |
|width=200| | |width=200| | ||
* [[ICP Etch 1]] | * [[ICP Etch 1]] | ||
Revision as of 09:57, 28 June 2012
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
- Rapid Thermal Processor
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)
Packaging
Inspection, Test and Characterization
- Field Emission SEM 1
- Field Emission SEM 2
- Step Profile
- Step Profilometer
- Ellipsometer
- Microscopes
- Probe Station & Curve Tracer
- Optical Film Thickness (Filmetrics)
- Scanning Probe Microscope
- Tencor Flexus Film Stress
- Optical Film Thickness (Nanometric)
- SEM Sample Coater
- Surface Analysis
- Photo-emission & IR Microscope
- Ellipsometer (Woollam)
- Goniometer
- 4-Point Probe Resistivity Mapper