Difference between revisions of "Tool List"

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(→‎Inspection, Test and Characterization: reorganized optical tools)
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|- valign="top"
 
|- valign="top"
 
| width="300" |
 
| width="300" |
=====Optical/Electron Microscopy=====
+
=====Optical Microscopy=====
  
 
*[[Microscopes|Optical Microscopes]]
 
*[[Microscopes|Optical Microscopes]]
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*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
*[[Photo-emission & IR Microscope (QFI)|Photo-emission & Thermal IR Microscope (QFI)]]
 
*[[Photo-emission & IR Microscope (QFI)|Photo-emission & Thermal IR Microscope (QFI)]]
 +
 +
===== Electron Microscopy =====
 
*[[Field Emission SEM 1 (FEI Sirion)]]
 
*[[Field Emission SEM 1 (FEI Sirion)]]
 
*[[Field Emission SEM 2 (JEOL 7600F)]]
 
*[[Field Emission SEM 2 (JEOL 7600F)]]
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*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 
| width="400" |
 
| width="400" |
=====Optical Material Analysis=====
+
=====Thin-Film/Material Analysis=====
  
 
====== Thickness + Optical Constants ======
 
====== Thickness + Optical Constants ======
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*[[Photoluminescence PL Setup (Custom)]]
 
*[[Photoluminescence PL Setup (Custom)]]
  
====== Electrical Device/Thin-Film Analysis ======
+
====== Electrical Analysis ======
 
*[[Resistivity Mapper (CDE RESMAP)]]
 
*[[Resistivity Mapper (CDE RESMAP)]]
 
*[[Probe Station & Curve Tracer]]
 
*[[Probe Station & Curve Tracer]]

Revision as of 10:48, 22 May 2020

Lithography

Photoresists and Lithography Chemicals
Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography
Lithography Support

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Plasma Etching and Cleaning
Etch Monitoring
ICP-RIE
Ion Milling and Reactive Ion Beam Etching
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical Microscopy
Electron Microscopy
Topographical Metrology
Thin-Film/Material Analysis
Thickness + Optical Constants
Other Properties
Electrical Analysis
Other Tools