Difference between revisions of "Tool List"

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(Thermal Processing)
(Thermal Processing)
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*[[Wafer Bonder (SUSS SB6-8E)]]
 
*[[Wafer Bonder (SUSS SB6-8E)]]
 
*[[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]
 
*[[Wafer Bonder (Logitech WBS7)|Wafer Bonder/Wax Mounting (Logitech WBS2)]]
*Solaris SSI RTP
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*[[Solaris SSI RTP]]
 
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*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all Lab Ovens]]
 
*[[Ovens - Overview of All Lab Ovens|Ovens - Overview of all Lab Ovens]]

Revision as of 10:49, 9 March 2020

Lithography

Photoresists and Lithography Chemicals
Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography
Lithography Support

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Plasma Etching and Cleaning
Etch Monitoring
ICP-RIE
Ion Milling and Reactive Ion Beam Etching
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing

Packaging

Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools