Difference between revisions of "Tool List"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(→‎Thermal Processing: link to RTP Solaris 150)
m (→‎Thermal Processing: corrected linberg --> lindberg over)
Line 123: Line 123:
* [[Tube Furnace (Tystar 8300)]]
* [[Tube Furnace (Tystar 8300)]]
* [[Tube Furnace Wafer Bonding (Thermco)]]
* [[Tube Furnace Wafer Bonding (Thermco)]]
* [[Tube Furnace AlGaAs Oxidation (Linberg)]]
* [[Tube Furnace AlGaAs Oxidation (Lindberg)]]
| width="400" |
| width="400" |
* [[Ovens 1, 2 & 3 (Labline)]]
* [[Ovens 1, 2 & 3 (Labline)]]

Revision as of 14:05, 28 May 2019


You can see our available photoresists on the Chemical Datasheets page.

Contact Aligners (Optical Exposure)
Other Patterning Systems
Steppers (Optical Exposure)
Thermal Processing for Photolithography

Vacuum Deposition

Physical Vapor Deposition (PVD)
Sputter Deposition
Chemical Vapor Deposition (CVD)

Dry Etch

Reactive Ion Etching (RIE)
Etch Monitoring
Other Dry Etching

Wet Processing

See the Chemical List page for stocked chemicals such as Developers, Etchants, Solvents etc.

Thermal Processing


Inspection, Test and Characterization

Optical/Electron Microscopy
Topographical Metrology
Thin-Film Analysis/Measurement
Other Tools